1

Analyses of smoke management models in TFT-LCD cleanroom

Year:
2013
Language:
english
File:
PDF, 1.70 MB
english, 2013
8

A MEMS multi-sensor chip for gas flow sensing

Year:
2005
Language:
english
File:
PDF, 284 KB
english, 2005
16

Polymer Deformable Mirror for Optical Auto Focusing

Year:
2007
Language:
english
File:
PDF, 547 KB
english, 2007
30

Low-Actuation-Voltage MEMS for 2-D Optical Switches

Year:
2006
Language:
english
File:
PDF, 909 KB
english, 2006